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Size: | 2, 4, 6, 8 inches, others can be customized; |
Process: | magnetron sputtering/thermal evaporation/electroplating, etc.; |
Structure: | substrate + adhesive layer + plating; |
Substrate material: | silicon wafer, quartz, BF33 glass, etc |
Types of metal films: | gold Au, platinum Pt, aluminum Al, copper Cu, nickel Ni, silver Ag and other metal films; |
Metal film thickness: | 10nm-10um; Common thickness: 100nm, 300nm, 500nm; Uniformity is better than 1%. |