SHANGHAI FAMOUS TRADE CO.,LTD
SHANGHAI FAMOUS TRADE CO.,LTD For The Good Reputation,By The Best Quality ,With The Fastest Efficiency.
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Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.
The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.
| Parameter | Specification |
|---|---|
| Material | High-purity SiC (≥99%) |
| Size | Customizable (for 4–12 inch wafers) |
| Surface Finish | Polished or matte per requirement |
| Thermal Resistance | Up to 1600°C |
| Chemical Resistance | Resistant to acids, bases, and plasma |
| Mechanical Strength | Flexural strength > 400 MPa |
| Cleanroom Grade | Suitable for Class 1–100 |
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